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1

Characterization of Pb(Zr,Ti)O3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications

Takaaki Suzuki, Isaku Kanno, Jacob J. Loverich, Hidetoshi Kotera, Kiyotaka Wasa

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 554 KB

english, 2006

2

Structure and mechanical properties of r.f. sputtered SiC films

Kiyotaka Wasa, Takeshi Nagai, Shigeru Hayakawa

Journal:

Thin Solid Films

Year:

1976

Language:

english

File:

PDF, 595 KB

english, 1976

3

Structures and electrical properties of zinc oxide films prepared by low pressure sputtering system

Toshio Hada, Kiyotaka Wasa, Shigeru Hayakawa

Journal:

Thin Solid Films

Year:

1971

Language:

english

File:

PDF, 777 KB

english, 1971

4

High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers

Keiji Morimoto, Isaku Kanno, Kiyotaka Wasa, Hidetoshi Kotera

Journal:

Sensors and Actuators A: Physical

Year:

2010

Language:

english

File:

PDF, 737 KB

english, 2010

5

Development of liquid pumping devices using vibrating microchannel walls

Junya Ogawa, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa, Takaaki Suzuki

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.35 MB

english, 2009

6

Hydrogen Ion Shower Effect for Oxide High Temperature Superconducting Thin Films

KAMADA, Takeshi, SETSUNE, Kentaro, HIRAO, Takashi, WASA, Kiyotaka

Journal:

Journal of the Ceramic Society of Japan

Year:

1988

File:

PDF, 357 KB

1988

7

Basic sputtering process and ferroelectric properties of single–domain single–crystal thin films of PbTiO 3

Wasa, Kiyotaka, Haneda, Yoko, Sato, Toshifumi, Adachi, Hideaki, Kanno, Isaku, Schlom, Darrell G., Trolier-Mckinstry, S., Gan, Qing, Eom, Chang-Beom

Journal:

Integrated Ferroelectrics

Year:

1998

Language:

english

File:

PDF, 684 KB

english, 1998

8

Sputter deposition technology as a materials engineering

Journal:

Bulletin of Materials Science

Year:

1993

Language:

english

File:

PDF, 1.14 MB

english, 1993

9

Bi-Sr-Ca-Cu-O thin films

Ichikawa, Yo, Adachi, Hideaki, Hirochi, Kumiko, Setsune, Kentaro, Hatta, Shin-ichiro, Wasa, Kiyotaka

Journal:

Physical Review B

Year:

1988

Language:

english

File:

PDF, 115 KB

english, 1988

10

Magnetoresistance and Upper Critical Fields of Oriented TlBaCaCuO Thin Films in Pulsed High Magnetic Fields up to 40 T

Staguhn, Wolfgang, Nakao, Koichi, Miura, Noboru, von Ortenberg, Michael, Hatta, Shin-ichiro, Ichikawa, Yo, Wasa, Kiyotaka

Journal:

Journal of the Physical Society of Japan

Year:

1989

File:

PDF, 932 KB

1989

11

Measurement of transverse piezoelectric properties of PZT thin films

Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 753 KB

english, 2003

12

Effects of PLT-buffer layer on microstructures of sputtered PLZT thin films epitaxially grown on sapphire

Wasa, Kiyotaka, Satoh, Toshifumi, Tabata, Kenji, Adachi, Hideaki, Yabuuchi, Yasumufi, Setune, Kentaro

Journal:

Journal of Materials Research

Year:

1994

Language:

english

File:

PDF, 11.93 MB

english, 1994

13

Strongly Induced Perpendicular Anisotropy in Magnetic Thin Films by Micro-Fabrication

Hatta, Shin-ichiro, Shiono, Teruhiro, Adachi, Hideaki, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 473 KB

1987

14

Investigation of Piezoelectricity and Curie Temperature of Pb(Mg 1/3 , Nb 2/3 )O 3 –PbTiO 3 Epitaxial Thin Film on Si Prepared by Sputter Deposition With Fast Cooling

Yoshida, Shinya, Morimura, Takumi, Wasa, Kiyotaka, Tanaka, Shuji

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2018

Language:

english

File:

PDF, 2.07 MB

english, 2018

15

Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuits

Kiyotaka Wasa, Shigeru Hayakawa

Journal:

Microelectronics Reliability

Year:

1967

Language:

english

File:

PDF, 675 KB

english, 1967

16

Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates

Wang, Yan, Wasa, Kiyotaka, Zhang, Shu-yi

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2012

Language:

english

File:

PDF, 595 KB

english, 2012

17

Growth and structure of heteroepitaxial lead titanate thin films constrained by miscut strontium titanate substrates

Ichikawa, Yoko, Matsunaga, Toshiyuki, Hassan, Mohsen, Kanno, Isaku, Suzuki, Takaaki, Wasa, Kiyotaka

Journal:

Journal of Materials Research

Year:

2006

Language:

english

File:

PDF, 232 KB

english, 2006

18

Single crystal thin films of conductive oxides SrRuO 3 and ferroelectric heterostructures

Eom, Chang-Beom, Rao, Rajesh A., Gan, Qing, Wasa, Kiyotaka, Werder, D. J.

Journal:

Integrated Ferroelectrics

Year:

1998

Language:

english

File:

PDF, 614 KB

english, 1998

19

Structures and resistive properties of sputtered TiZrAlN thin films

Kiyotaka Wasa, Shigeru Hayakawa

Journal:

Thin Solid Films

Year:

1972

Language:

english

File:

PDF, 702 KB

english, 1972

20

Some features of magnetron sputtering

Kiyotaka Wasa, Shigeru Hayakawa

Journal:

Thin Solid Films

Year:

1978

Language:

english

File:

PDF, 1.30 MB

english, 1978

21

Growth and microstructures of sputtered ferroelectric PbTiO 3 thin films

Wasa, Kiyotaka, Satoh, Toshifumi, Adachi, Hideaki, Setsune, Kentaro

Journal:

Integrated Ferroelectrics

Year:

1996

Language:

english

File:

PDF, 1.25 MB

english, 1996

22

Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O3 thin films on si wafer prepared by fast cooling immediately after sputter deposition

Yoshida, Shinya, Hanzawa, Hiroaki, Wasa, Kiyotaka, Esashi, Masayoshi, Tanaka, Shuji

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2014

Language:

english

File:

PDF, 3.77 MB

english, 2014

23

Superconducting phase control for the high-Tc superconducting thin films

Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi, Kumiko Hirochi, Yo Ichikawa, Kentaro Setsune

Journal:

Thin Solid Films

Year:

1989

Language:

english

File:

PDF, 679 KB

english, 1989

24

single-crystal films

Adachi, Hideaki, Setsune, Kentaro, Wasa, Kiyotaka

Journal:

Physical Review B

Year:

1987

Language:

english

File:

PDF, 162 KB

english, 1987

25

Ferroelectric properties of Pb(Mn[sub 1/3]Nb[sub 2/3])O[sub 3]−Pb(Zr,Ti)O[sub 3] thin films epitaxially grown on (001)MgO substrates

Zhang, Tao, Wasa, Kiyotaka, Kanno, Isaku, Zhang, Shu-Yi

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2008

Language:

english

File:

PDF, 741 KB

english, 2008

26

A Current Instability in TiO 2 Thin Film

Hada, Toshio, Hayakawa, Shigeru, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1970

File:

PDF, 1.07 MB

1970

27

Thin Film Materials Technology || Thin Film Materials and Devices

Year:

2004

Language:

english

File:

PDF, 191 KB

english, 2004

28

Characteristics of Superconducting Gd-Ba-Cu-O Thin Films

Hayashi, Shigenori, Kamada, Takeshi, Kohiki, Shigemi, Hirao, Takashi, Wasa, Kiyotaka, Matsuda, Akihisa, Hangyo, Masanori, Nakashima, Shin-ichi

Journal:

Japanese Journal of Applied Physics

Year:

1990

Language:

english

File:

PDF, 152 KB

english, 1990

29

Bragg AâO Deflector Using a Piezoelectric PLZT Thin Film

Adachi, Hideaki, Mitsuyu, Tsuneo, Yamazaki, Osamu, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1985

File:

PDF, 434 KB

1985

30

Interfacial properties of a hetero-structure YSZ/p-(1 0 0)Si prepared by magnetron sputtering

Sanghun Jeon, Matsuda Takanori, Akira Unno, Kiyotaka Wasa, Yoko Ichikawa, Hyunsang Hwang

Journal:

Year:

2002

Language:

english

File:

PDF, 288 KB

english, 2002

31

Structure and electrical properties of amorphous PbTiO3 thin films sputtered on cooled substrates

Makoto Kitabatake, Tsuneo Mitsuyu, Kiyotaka Wasa

Journal:

Journal of Non-Crystalline Solids

Year:

1982

Language:

english

File:

PDF, 416 KB

english, 1982

32

Thin Film Materials Technology || Preface

Year:

2004

Language:

english

File:

PDF, 14 KB

english, 2004

33

Discharges between Coaxial Cylinders in a Magnetic Field

Hayakawa, Shigeru, Wasa, Kiyotaka

Journal:

Journal of the Physical Society of Japan

Year:

1965

File:

PDF, 890 KB

1965

34

Influence of Deposition Conditions on the Properties of Silicon Nitride Films Prepared by the ECR Plasma CVD Method

Hirao, Takashi, Setsune, Kentaro, Kitagawa, Masatoshi, Kamada, Takeshi, Wasa, Kiyotaka, Izumi, Tomio

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 826 KB

1987

35

Excitation of Rotational Oscillation in a Crossed Field Discharge

Hayakawa, Shigeru, Wasa, Kiyotaka

Journal:

Journal of the Physical Society of Japan

Year:

1964

File:

PDF, 142 KB

1964

36

Preparation of (Pb, La)TiO 3 –PbTiO 3 Thin Films with Superlattice Structure

Adachi, Hideaki, Mitsuyu, Tsuneo, Yamazaki, Osamu, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 474 KB

1987

37

High Ferroelectricities and High Curie Temperature of BiInO 3 PbTiO 3 Thin Films Deposited by RF Magnetron Sputtering Method

Sun, Ke-xue, Zhang, Shu-yi, Wasa, Kiyotaka

Journal:

Chinese Physics Letters

Year:

2018

Language:

english

File:

PDF, 1.12 MB

english, 2018

38

[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Highly c-axis oriented monocrystalline Pb(Zr, Ti)O3 based thin film on Si wafer by sputter deposition with fast cooling process

Hanzawa, Hiroaki, Yoshida, Shinya, Wasa, Kiyotaka, Tanaka, Shuji

Year:

2014

Language:

english

File:

PDF, 486 KB

english, 2014

39

High piezoelectricity of Pb(Zr,Ti)O[sub 3]-based ternary compound thin films on silicon substrates

Zhang, Tao, Wasa, Kiyotaka, Zhang, Shu-yi, Chen, Zhao-jiang, Zhou, Feng-mei, Zhang, Zhong-ning, Yang, Yue-tao

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 442 KB

english, 2009

40

Basic Thin Film Process for Perovskite Ferroelectric Materials

Adachi, Hideaki, Wasa, Kiyotaka

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 1.43 MB

english, 1990

41

[IEEE 2017 IEEE International Ultrasonics Symposium (IUS) - Washington, DC, USA (2017.9.6-2017.9.9)] 2017 IEEE International Ultrasonics Symposium (IUS) - The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Shimidzu, Takahiro, Yanagitani, Takahiko, Wasa, Kiyotaka

Year:

2017

Language:

english

File:

PDF, 57 KB

english, 2017

42

Vacuum Technology for a Better Global Environment.

Journal:

Journal of The Surface Finishing Society of Japan

Year:

1999

File:

PDF, 1.21 MB

1999

43

Thin films for material engineering

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.92 MB

english, 2016

44

A new tupe of crystal structure in the Pb-Pr-Sr-Cu-O system

Seiji Adachi, Osamu Inoue, Syunichiro Kawashima, Hideaki Adachi, Yo Ichikawa, Kentaro Setsune, Kiyotaka Wasa

Journal:

Physica C: Superconductivity

Year:

1990

Language:

english

File:

PDF, 521 KB

english, 1990

45

Piezoelectric thin films of zinc oxide for saw devices

Mitsuyu, Tsuneo, Yamazaki, Osamu, Ohji, Kenzo, Wasa, Kiyotaka

Journal:

Year:

1982

Language:

english

File:

PDF, 866 KB

english, 1982

46

Transparent conductive Cd[sub 3]TeO[sub 6] thin films with perovskite structure

Tetsuka, Hiroyuki, Shan, Yue Jin, Tezuka, Keitaro, Imoto, Hideo, Wasa, Kiyotaka

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2006

Language:

english

File:

PDF, 364 KB

english, 2006

47

Preparation and Characterization of Superconducting Y-Ba-Cu-O Thin Films

Adachi, Hideaki, Setsune, Kentaro, Mitsuyu, Tsuneo, Hirochi, Kumiko, Ichikawa, Yo, Kamada, Takeshi, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1987

Language:

english

File:

PDF, 64 KB

english, 1987

48

Magnetic Aftereffects in High T c Superconducting Thin Films

Hatta, Shin-ichiro, Ichikawa, Yo, Adachi, Hideaki, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 161 KB

english, 1989

49

Superconductivity in “1201” Lead Cuprate

Adachi, Seiji, Setsune, Kentaro, Wasa, Kiyotaka

Journal:

Japanese Journal of Applied Physics

Year:

1990

Language:

english

File:

PDF, 402 KB

english, 1990

50

Electrical Properties of Mixed Oxide Film of PbO and TiO 2

Kusao, Kenji, Wasa, Kiyotaka, Hayakawa, Shigeru

Journal:

Japanese Journal of Applied Physics

Year:

1968

Language:

english

File:

PDF, 385 KB

english, 1968

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